1200 DWDM	1200 PCS	900 PCS	MC 370
Chamber Volume	l	1830	1830	705	374
Substrate Heating	C	400	400	400	400
Substrate Carrier		Wafer	Dome	Dome	Dome
Pump System	.	.	.	.	.	.	.
Rotary (double stage)	m3/h	175	175	80	30
Roots	m3/h	1200	1200	500
Diffusion	l/s	20000	20000	11500	1500
Baffle	mm	630	630	500
Time to Vac. to 1x10-6 mbar	min	12	12	12	10
Components	.	.	.	.	.	.	.
Plasma Deposition Source	PDS	Yes	Optional	Optional	Optional
Rate Monitor	Inficon	IC/5	IC/5	IC/5	IC/5
Optical Monitor	IOM	Yes	Optional	Optional	Optional
RGA	Transpector	Optional	Optional	Optional	Optional
Control System	Version	Artisan	Artisan	Artisan	Artisan
Polycold	type	CC11S	CC11S	CC11S	CC4S
Glow Discharge is optional
Evaporation Options	.	.	.	.	.	.	.
No of Sources	pcs	3	4	3	2
EB Guns	.	.	.	.	.	.	.
Power	kW	15	15	15	6
High Voltage range	kV	6-10	6-10	6-10	3-7