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Spares from: E.T.A., EAO, EAO Olten, Eaton, Eaton Semiconductor Equipment, |
| E.T.A. | |||
| 96152D01 | Electrode, Thermocouple |
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| Back to Top ^ | |||
| EAO | |||
| 31-122-025 | Switch, Rectangular Momentary |
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| 51-165.0 | Indicator, Momentary Rectangle Pushbutton Actuator without Contcat Block.Lamp, Max. 60V, 1.2W |
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| 51.971.022 | Switch Contact Block |
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| EAO OLTEN | |||
| 11-433-836 | Switch, Overload |
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| Back to Top ^ | |||
| EATON | |||
| 0100-00219 | Tee Male 1/4" Hose |
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| 0100-00431 | Link, Carriage chain KASP4K |
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| 0100-00450 | Fitting, 1/8" Elbow NYL KAS |
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| 0100-00453 | Fitting, Cliplock Male 1/4" |
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| 0101-00126 | Cylinder, air, KASP III 0001, 150psi max. |
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| 0101-00128 | Cylinder, air Scrub KASP4K |
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| 0101-00129 | Cylinder, Scrub Brush KASP4 |
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| 0101-00186 | Valve, Cliplock FEM 1/4" |
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| 0101-00192 | Solenoid, 2way 0066 KASP I |
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| 0101-00199 | Valve, Cliplock Female 3/8" |
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| 0101-00202-04 | Valve, Flow control, Resist, Suck Back |
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| 0101-00249 | Piston, + DEV KASP4K |
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| 0101-00280-03 | Gauge, Pressure, 0-15psi, 0006 15G |
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| 031562 | Lamp, Igniter, Ignitor, type GTL3 |
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| 0380-00181 | Coupling, + VE DEV |
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| 0491-00040 | Solenoid, Unload latch, KASP |
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| 0519-00041 | Screw, KASPIII Scrubber BRU, countersunk, socket head |
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| 0590-00023 | Ring, KASP 4K Spindle RET 0 |
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| 0590-0014 | Tru-Arc KASP |
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| 0897-0034-0001 | 3pc Arc Chamber, Ion Implanter Spares |
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| 10-32X1/4 | Screw, 10-32x1/4 |
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| 1089350 | GSD HE RF Resonator (Refurbished by Axcelis) |
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| 1102030 | Gas Feed Through Source |
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| 1103250 | Shaft Drive |
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| 1103251 | Shaft Drive |
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| 1104870 | Power Supply, 5V 100A |
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| 1112060 | Clutch Elevator |
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| 1134780 | Switch, flow, Assy Part# 60134 Serial# 1150180 From Proteus |
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| 1136070 | Feedthrough, High Current M954640 |
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| 1138440 | Accelerometer Assy |
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| 1138640 | Suppression Plate |
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| 1139500 | Lever Arm Assay 125M |
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| 114473 | PCB, Extender card |
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| 1150190 | Flow Indicator Magne. / Proteus Industries Inc 74645 |
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| 1150761 | Rep. Kit FTI remplace |
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| 1152940 | Lever Assy Wafer |
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| 1201310 | Thermocouple |
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| 1203800 | Modified screw |
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| 1204520 | Motor, Shaft mod.12V 4PH .65A 1.8DEG / Eastern Air Device Linear Actuator LA23GCKC-3 |
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| 1401000 | PCB, Power Control Board - Vaporizer Component Side |
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| 1403750 | PCB Assy Electrode Suppression PA 10C |
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| 1404590 | HEX serial insulator |
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| 1407620 | Data entry interface board |
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| 1430-00113 | Belt, toothed, 0.08"pitch, 14" long, 1/4" wide. IC0 Tooth KASP4K |
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| 1430-00140 | Sprocket, Bead 0061 KASP4K |
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| 1430-00162 | Pulley, Scrubb Brush 103 |
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| 1460-00111 | Spring, Unload latch |
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| 1500-00083 | Belt, toothed, 0.08"pitch, 11.5" long, 1/4" wide. MTR KASP4K |
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| 1500182 | PCB, I/Q port MA |
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| 1500290 | Vaporizer Temperature PCB |
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| 1500570 | PCB, Assembly |
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| 1500980 | PCB, assy, flat sensor |
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| 1500990 | Vaporizer Control |
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| 1501090 | PCB, Beam lock |
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| 1501160 | PCB, Memory Board |
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| 1501521 | PCB, CPU Card 990/100 for TM990 system |
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| 1501820 REV A | PCB, Datalock Slave Board, Rev A |
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| 1503000 | PCB, TM990 I/O Board TM 990 |
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| 1503060 | PCB, Remote Controller |
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| 1503230 | PCB, Analog, for TM990 system |
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| 1503750 | PCB Assy Electrode Suppression PA 10C |
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| 1503950 | PCB, assy backpln |
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| 1504130 | Interconnect System |
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| 1504350 | PCB, Assembly RMT Cont BF |
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| 1504580 | PCB, Assembly Power, Rev A |
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| 1504820 | PCB, Assembly Input Trans |
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| 1504931 | PCB, CPU Matrox |
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| 1505050 | PCB, assy datalk interference |
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| 1505110 | PCB, Assy CPU VAC (TM990 101MA) |
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| 1505820 | PCB, Dose Cont CPU |
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| 1507080 | Datalock I/O board |
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| 1507240 | PCB, transient assy |
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| 1507400 | PCB, Opto isolator Board |
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| 1507560 | PCB, Assy Remote Control Interface |
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| 1507630 | PCB, assy data entry |
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| 1507720 | PCB, Assy Resn cont 5 |
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| 1507722 | PCB, Assy Reson. Cont. |
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| 1507730 | PCB, Assy Com. Oscill. |
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| 1507742 | PCB |
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| 1507743 | PCB, Assy RMT A/D-IO |
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| 1516820 | PCB |
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| 1516900 | PCB, TM990 CPU 101MB, Cermaic 9900, NV ram. |
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| 1516940 | PCB, Lead Screw Interface Board |
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| 1555-00007 | Nozzle, Fluid 00007 |
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| 1555-00008 | Nozzle, Air 00008 |
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| 1555-00025 | Ring, Knurl KASP III 00009, 3/4" thread, 0.635 ID hole. |
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| 1612120 | Cable, RF 5.2MHz |
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| 1621411 | Cable, Filament |
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| 1700240 | Feedthrough, Filament |
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| 17010200 | STDF CLP CPLR Ceramics |
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| 17010210 | STDF CPLR Ceramic |
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| 17011780 | Insulator |
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| 17012100 | Insulating Washer |
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| 17018100 | Stop rear |
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| 17018110 | Out Board Wafer |
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| 17018120 | Stud Rear Stop |
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| 17020550 | Plate, Aperture R |
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| 17020551 | Plate, Aperture |
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| 17041480 | Tube, Extension |
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| 17041490 | Beam dump |
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| 17041500 | Aperture Resolving |
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| 17041520 | Aperture Graphite |
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| 17041800 | Drip Pan Price Cool Pump 80 Kit |
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| 1704990 | Side Plate, Ion Implanter Spares |
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| 1705001 | Plate, Arc Chamber Re |
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| 17053090 | Tend Stop High Cur. |
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| 17059990 | Clevis |
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| 1717482 | Face Plate, Ion Implanter Spares |
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| 1733710 | Bearing, Pad |
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| 1755630 | Graphite Ground Disc |
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| 1760780 | Rod, MTG Pole Shoe |
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| 1761840 | Aperture Graphite MA |
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| 1761850 | Aperture Graphite BE |
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| 1762520 | Shield Beam |
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| 1766040 | Guide, R |
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| 1766080 | Magnetic Shoe 1.25 Gap MA |
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| 1766570 | STDF BM PLT |
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| 1766640 | Clevis |
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| 1767370 | Bearing, Shaft |
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| 1770530 | Slit Plate Arc Chamber |
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| 1770540 | Plated end Shield |
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| 1770550 | End Plate Arc Chamber |
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| 1771080 | Electrode, Ground |
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| 1772010 | Ground Electrode |
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| 1774070 | RLR Slide |
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| 17766580 | Plate, beam |
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| 1781650 | Clamp, Locator Shaft |
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| 1784780 | Feedtrough connector |
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| 1784790 | Strap Exp |
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| 1784820 | Insulator Block |
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| 1784880A | HSG Electron SHWR |
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| 1785810 | Screen Wafer Clamp |
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| 1787740 | Trapelectron Shower |
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| 1788020 | Feedtrough Flange |
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| 1788030 | Feedthrough |
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| 1789810 | End Plate, Ion Implanter Spares |
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| 1792520 | Roller, Faraday Showe |
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| 1792551 | Faraday Cup Graphite |
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| 1796490 | Mounting Insulator |
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| 1796790 | DR Nut NV-1 |
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| 1796791 | DR Nut NV-1 |
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| 1796800 | Electrode, Truncated |
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| 1796840 | Extration Electrode |
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| 1798510 | Block, Suppression |
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| 1820-00238 | IC, P1262 (N8T97D), PROM, programmed code: 1820-00238 |
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| 1820-00273 | IC, DAC D8CZ |
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| 1900040 | Switch, Cylinder |
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| 1900070 | PCB, A to D (analog to digital) |
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| 1900870 | Coupling, AE Spietr DSK-2.50x3.50-01 |
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| 1902-290C | RF Power Supply, 1KW, 5.2MHz. |
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| 1902242 | RF Cont Band M Plug |
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| 1902251 | RF Band F SKT |
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| 1903040 | PCB, TM990/101MB CPU board |
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| 1905160 | Sliding Seal Set |
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| 1990-00019 | Sensor, TIL78 IR receiver |
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| 1990-00020 | Sensor, MRD 360 |
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| 1990-00023 | Sensor, 0PB804 INDEX 0026 |
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| 1990-00027 | Sensor, brake SEARCH T1L81 |
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| 2000088 | Feedthrough 80KeV |
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| 2000216 | PCB, driver |
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| 2000520 | Variac Brush KSI From Superior Electric |
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| 2001-0115 | Rod, End Oven 0115 |
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| 2100041 | Power Products PM861 |
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| 2100071 | Converter, DC/DC |
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| 2140-00066 | Lamp, Sensor SCE0014 |
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| 2140-00075 | Lamp, Overload Sensor |
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| 2500151 | Ball Slide for Wafer |
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| 3101-00101 | Switch, Vacuum, 00045 KASP I Range 30" to 0 hg VAC/-100 to 0 kpa, Type J40, Model 218 |
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| 3101-00134 | Switch, Momentary, AR0092 KASP |
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| 3101-00135 | Switch, Auto/Manual, with lamp holder, 0093 KASP I |
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| 3101-00144 | Switch, IDX start/stop, with lamp holder, KASP III |
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| 3101-00146 | Switch, 1c/o, Latch, with lamp holder, KASP4K |
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| 3101-00200 | Switch, Keyboard, Enter, KASP |
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| 3101-00216 | Switch, on/off, 6A, push/push, red button, with lamp holder, KASP4K |
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| 3130-00085 | Cap, Switch, White KASP4K |
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| 3130-00086 | Cap Switch, Red KASP4K |
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| 3130-00105 | Button, for push-button switch, white (IDX Reset KASP III) |
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| 3150-00016 | Gasket, KASP4K Vac Bowl |
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| 316-563 | Switch, Index toggle, KASP I |
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| 3200019 | Solenoid, 3W Humphrey 31E1 120 |
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| 3500255 | Seal, oil 21/8" Bore |
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| 3500256 | Seal, Oil 1.850 Bore |
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| 3500257 | Seal, ARI0400 -321VC |
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| 3500487 | Special Seal |
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| 36F6689 |
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| 400-31973-01 | Ring + DEV Catchcup KASP4K |
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| 400-31974-01 | Ring + DEV Teflon KASP4K |
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| 400-31975-01 | Screw, + DEV Catchcup KASP4 |
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| 400-31976-02 | Catchcup DEV + KASP4K |
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| 400-32411-04K | Machining Elev. Spindle |
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| 400-32718-01B | Conveyor motor plate |
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| 400-33344-01 | Insert, Disp Nozz Scrubb KA |
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| 400-33999-01 | Pulley, convey (501-30375) |
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| 400-34879-01 | Controller, Programmable, Series 945, PID |
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| 400-34962-01 | Shaft, Spindle 13524 |
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| 400-35012-01 | Bumper strip CARR 2679 KASP4 |
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| 400-35470-01 | Seal, Shaft, KASP4K Spindle, 1/4" x 5/8" x 0.2". |
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| 4001-6888 | Seal, Nylon, Kaper III, 15.25mm OD, 7.75mm ID, 1.15mm thick |
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| 401-06211 | Hook, Scrub Brush KASP4K |
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| 401-06477 | Index lead Screw KASP4K |
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| 401-06821 | Housing, spindle KASP4K |
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| 401-06869 | Nut, LD SCRE INDX KASP4K |
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| 401-06890 | Adaptor shaft KASPIII |
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| 401-06919 | Spring, centre device III |
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| 403-06967 | Coupler, photo KASP4K |
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| 403-30154 | Diaphragm, Scrub KASP4K |
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| 410-06378 | Catchcup, 4" KASPIII |
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| 4100004 | Pulley, Timing |
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| 4100082 | Belt, Timing |
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| 4200126 | Bushing, Ball Res MT / Thomson RSL 500 |
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| 4300498 | Pin, DWL 0626X.50L |
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| 430497 | Pin, SPL CP645 |
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| 4400001 | Screw, 10-32x3/8 SHCS SS |
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| 4400053 | Screw, 10-32x1/2 FL/S |
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| 4400120 | Screw, 2-56x1/4 S/H/C |
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| 4600129 | Washer, Bellul |
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| 4618809EO1 | Manifold + VE DEV KASP4K |
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| 5000110 | Base, Relay |
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| 5000114 | Contact |
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| 5000593 | Motor Starter 3HP |
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| 5000594 | Motor Starter |
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| 5000933 | Relay, Time delay, Diversified Electronics TDD-0150 |
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| 5001-7485 | Sensor block 7485 |
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| 5001-7751 | Element, Upper ICO 7751 |
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| 501-07029 | Latch, unload assembly KASPIII |
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| 501-07206 | Head scrub, Disp+Piping KAS |
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| 501-31318 | Box + DEV Valve ASS KASP4K |
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| 501-34372-01 | Nozzle, Resist 1709 |
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| 501-50010 | PCB, Power supply, 50010 KAS |
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| 501-50021-01 | PCB, Memory 50021 KASP4K |
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| 501-50033 | PCB, CON/ICO Sensor 50033 |
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| 501-50051 | PCB, CCU 50000 KASP4K |
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| 506-31781-01 | Cable, Spin MTR Harness KA |
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| 5100304 | Plug, 3way, 15A 125V 4720-C NY Hubbell |
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| 5100448 | Quick Connect F 30 |
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| 527-32569-01 | PCB, Resist pump 7124 KASP4 |
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| 60-300 | Power Supply for Shunt Motor Fenner SD1-1525-101-1 |
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| 6000327 | Accelerometer /Setra 141A-2G N537243 |
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| 6300082 | Transistor, IRF 453, N channel Mosfet, 450V 11A |
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| 6500114 | Mercury wetted contact relay from Midland Ross 162-151 AOO |
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| 6500218 | Switch, pressure, AT4 |
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| 6500258 | Switch, optical |
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| 6500381 | Switch, OPT CLI-8905 |
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| 6500406 | Switch |
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| 67F8523 |
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| 78SM-3 | Clip, ICO Tach/Encode MTG KA |
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| 8120-00019 | Cable, Retractile, retracted length: 2ft, extended: 10ft, 4 way, IDX CL KASP4K |
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| 81805-001 | Gear, Nylon, Carr Motor KASP |
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| 9100-00039 | Transformer, 115/230v input, 34v, 700mA output |
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| 9100-00040 | Transformer, Filament, CPU 6VAC KASP |
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| 9100-00046 | Transformer, 115/230v input, 12v output KAS |
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| E1404650 | PCB |
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| E1407080 | PCB, interface board |
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| E1407590 | PCB, Power Board |
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| E1507070 | PCB, Sensor Board |
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| E1621415 | Cable, with Lugs |
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| OPB875T55 | Opto, OPB875T55 Interrupt KA |
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| Back to Top ^ | |||
| EATON SEMICONDUCTOR EQUIPMENT | |||
| 2200024C | Series 2000 HV Unit (218363) |
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| Back to Top ^ | |||
| EATON | |||
| YJ03880 | PCB, art# 1403880 |
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| Back to Top ^ | |||
